Michael L. Parodi

MICHAEL L. PARODI joined Tegal Corporation as Director, President and
Chief Executive Officer in December 1997 and assumed the additional role
of Chairman of the Board in March 1999. During his 30-year career in the
semiconductor and capital equipment industries, Mr. Parodi served as
Chairman and CEO of Semiconductor Systems Inc. and in senior management
and operational roles for high technology manufacturing, engineering and
new product introductions with companies such as General Signal
Corporation, Signetics, Raytheon, Fairchild Semiconductor and National
Semiconductor. He is a member of the Semiconductor Equipment and
Materials International Board of Directors.