Mary G. Puma

MARY G. PUMA has been the President and Chief Executive Officer of
Axcelis Technologies, Inc., since January 2002. Prior to her current
position, she also served as President and Chief Operating Officer from
May 2000 to January 2002, and Vice President from February 1999 to May
2000. In 1998, she became General Manager and Vice President of Axcelis’
Implant Systems Division. In May 1996, she joined Eaton Corporation as
General Manager of the Commercial Controls Division. Prior to joining
Eaton, Ms. Puma spent 15 years in various marketing and general
management positions for General Electric Company. Ms. Puma has a
Bachelor’s degree in Economics from Tufts University and a Master’s
degree in Management from the M.I.T. Sloan School of Management.